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Modeling and analysis of a phase change material thermohydraulic membrane microactuator
KTH.
Uppsala University.
Uppsala University /VTT Technical Research Center Finland, Espoo, Finland.
2013 (Engelska)Ingår i: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 22, nr 1, s. 186-194Artikel i tidskrift (Refereegranskat) Published
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Abstract [en]

Presented in this work, is a Finite Element Method (FEM)-based model for phase change material actuators, modeling the active material as a fluid as opposed to a solid. This enables the model to better conform to localized loads, as well as offering the opportunity to follow material movement in enclosed volumes. Modeling, simulation and analysis of an electrothermally activated paraffin microactuator has been conducted. The paraffin microactuator used for the analysis in the current study exploits the large volumetric expansion of paraffin upon melting, which combined with its low compressibility in the liquid state allows for high hydraulic pressures to be generated. The purpose of the study is to supply a geometry independent model of such a microactuator through the implementation of a fluid model rather than a solid model, which has been utilized in previous studies. Numerical simulations are conducted at different frequencies of the heating source and for different geometries of the microactuator. The results are compared with the empirical data obtained on a close to identical paraffin microactuator, which clearly show the advantages of a fluid model instead of a solid state approximation.

Ort, förlag, år, upplaga, sidor
2013. Vol. 22, nr 1, s. 186-194
Nyckelord [en]
Finite element methods, fluid dynamics, microactuators, microelectromechanical devices, steel
Nationell ämneskategori
Annan maskinteknik
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URN: urn:nbn:se:sh:diva-30158DOI: 10.1109/JMEMS.2012.2222866ISI: 000314726900026Scopus ID: 2-s2.0-84873288511OAI: oai:DiVA.org:sh-30158DiVA, id: diva2:932485
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VetenskapsrådetTillgänglig från: 2013-02-18 Skapad: 2016-06-01 Senast uppdaterad: 2017-11-30Bibliografiskt granskad

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